31363130
Bulk Gas Filter
Bulk Gas Filter >0.0015μm Buttweld 101.6 mm 30000 SLPM SS316L
| Article | 31363130 |
|---|---|
| Description | Bulk Gas Filter >0.0015μm Buttweld 101.6 mm 30000 SLPM SS316L < 10µm Ra |
| Material | SS316L |
| Material sintered filter media | Penta Nickel |
| Maximum working pressure | 27.6 barg |
| He leak rate | Up to 10-9 atm cc/sec |
| Maximum differential pressure | 17.2 bar |
| Flow rate | 30000 SLPM |
| Max. operating temperature | 450° C |
| Connection type | Tube Stub |
| Particle shedding | Zero particle contribution above background (<1 particle> |
| Total hydrocarbons | Below detectable limits per ASTM F1398 test method |
| Moisture contribution | <10 ppb after 1 hour at low-flow ambient purge per semi f27 test method |
| Particle removal size | > 0.0015 μm |
| Filter efficiency (log reduction value) | > 9 LRV (99.9999999% reduction in particles). Confirmed at the most penetrating particle size of 0.08 μm per SEMI F38-0699 test method |
| Polishing | Electro polishing |
| Surface finish | < 10µm Ra |
| C | 101.6 mm |
|---|---|
| Ø D | 152,4 mm |
| L | 467,8 mm |
| Remarks | Custom designs and fittings available |
|---|
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Bulk Filters provide 9-log filtration of particles down to 0.0015 µm resulting in particle-free gas. In addition, the flow versus differential pressure performance of the filter is equal or superior to the performance of competitive polymer products on the market today.