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31363140

Bulk Gas Filter

Bulk Gas Filter >0.0015μm Buttweld 101.6 mm 28000 SLPM SS316L

Technical Specifications
Article31363140
DescriptionBulk Gas Filter >0.0015μm Buttweld 101.6 mm 28000 SLPM SS316L < 10µm Ra
Material
SS316L
Material sintered filter media
Penta Nickel
Maximum working pressure
27.6 barg
He leak rate
Up to 10-9 atm cc/sec
Maximum differential pressure
17.2 bar
Flow rate
28000 SLPM
Max. operating temperature
450° C
Connection type
Tube Stub
Particle shedding
Zero particle contribution above background (<1 particle>
Total hydrocarbons
Below detectable limits per ASTM F1398 test method
Moisture contribution
<10 ppb after 1 hour at low-flow ambient purge per semi f27 test method
Particle removal size
> 0.0015 μm
Filter efficiency (log reduction value)
> 9 LRV (99.9999999% reduction in particles). Confirmed at the most penetrating particle size of 0.08 μm per SEMI F38-0699 test method
Polishing
Electro polishing
Surface finish
< 10µm Ra
Dimensions
C
101.6 mm
Ø D152,4 mm
L
594,6 mm
Remarks
Remarks
Custom designs and fittings available
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General information

Bulk Filters provide 9-log filtration of particles down to 0.0015 µm resulting in particle-free gas. In addition, the flow versus differential pressure performance of the filter is equal or superior to the performance of competitive polymer products on the market today.

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