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31342007

Diffuser

Diffuser >0.0015μm Face seal male swivel 1/4 SS316L

Technical Specifications
Article31342007
DescriptionDiffuser >0.0015μm Face seal male swivel 1/4 SS316L
Material
SS316L
Material sintered filter media
SS316L
Connection type
Face seal male swivel
Outlet connection
ISO NW50(Bulkhead mount with standard ISO bulkhead clamps)
Particle shedding
Zero particle contribution above background (<1 particle>
Particle removal size
Confirmed down to > 0.0015 μm
Diffuser shape
Disc
Dimensions
C
Face seal male swivel 1/4
Ø D74,9 mm
Ø d50.8 mm
L
37 mm
Remarks
Remarks
Diffusers can be customized according to individual applications.
Remarks
Custom designs and fittings available
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General information

GasShield® Diffusers quickly vent vacuum chambers to atmosphere which decreases cycle time and increases throughput. Our stainless steel diffusers provide uniform and laminar gas flows without disturbing particles in the chamber. These diffusers also remove particles greater than 0.0015 µm from incoming gas, minimizing defects on the wafer. Stainless steel diffusers can withstand higher operating pressures and maintain product integrity for more than three million cycles – the longest lifetime in the industry. And, for corrosion resistance that is superior to stainless steel and nickel, use GasShield® Hastelloy® C-22 Diffusers.

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