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Filtration - Diffusers

GasShield® Diffusers quickly vent vacuum chambers to atmosphere which decreases cycle time and increases throughput. Our stainless steel diffusers provide uniform and laminar gas flows without disturbing particles in the chamber. These diffusers also remove particles greater than 0.0015 µm from incoming gas, minimizing defects on the wafer. Stainless steel diffusers can withstand higher operating pressures and maintain product integrity for more than three million cycles – the longest lifetime in the industry. And, for corrosion resistance that is superior to stainless steel and nickel, use GasShield® Hastelloy® C-22 Diffusers.

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3D

2D

31342005

Diffuser >0.0015μm Face seal male swivel 1/4 SS316L

Quantity:

3D

2D

Diffusers
C
Face seal male swivel 1/4
Ø D54,9 mm
Ø d35.6 mm
L
37 mm

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3D

2D

31342007

Diffuser >0.0015μm Face seal male swivel 1/4 SS316L

Quantity:

3D

2D

Diffusers
C
Face seal male swivel 1/4
Ø D74,9 mm
Ø d50.8 mm
L
37 mm

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3D

2D

31342010

Diffuser >0.0015μm Face seal male 1/4 SS316L

Quantity:

3D

2D

Diffusers
C
Face seal male 1/4
Ø D165,1 mm
Ø d99.0 mm
L
31,8 mm

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3D

2D

31342015

Diffuser >0.0015μm Face seal male swivel 1/4 SS316L

Quantity:

3D

2D

Diffusers
C
Face seal male swivel 1/4
Ø D74,9 mm
Ø d50.8 mm
L
37 mm

More information

3D

2D

31342020

Diffuser >0.0015μm Face seal male 1/4 SS316L

Quantity:

3D

2D

Diffusers
C
Face seal male 1/4
Ø D40,1 mm
Ø d12.7 mm
L
104,1 mm
L1
66 mm

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3D

2D

31342025

Diffuser >0.0015μm Face seal male 1/4 SS316L

Quantity:

3D

2D

Diffusers
C
Face seal male 1/4
Ø D54,9 mm
Ø d15.2 mm
L
106,7 mm
L1
69,6 mm

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