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Filtration

High purity filters and spargers, specially designed to meet the strict requirements during the removal of particles in process gases in, for example, semiconductor applications.

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31363010

Bulk Gas Filter >0.0015μm Buttweld 50.8 mm 4500 SLPM SS316L < 10µm Ra

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31363020

Bulk Gas Filter >0.0015μm Buttweld 50.8 mm 15000 SLPM SS316L < 10µm Ra

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31363115

Bulk Gas Filter >0.0015μm Buttweld 50.8 mm 19000 SLPM SS316L < 10µm Ra

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31363120

Bulk Gas Filter >0.0015μm Buttweld 101.6 mm 19000 SLPM SS316L < 10µm Ra

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31363130

Bulk Gas Filter >0.0015μm Buttweld 101.6 mm 30000 SLPM SS316L < 10µm Ra

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31363140

Bulk Gas Filter >0.0015μm Buttweld 101.6 mm 28000 SLPM SS316L < 10µm Ra

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31363150

Bulk Gas Filter >0.0015μm Buttweld 152.4 mm 28000 SLPM SS316L < 10µm Ra

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31363160

Bulk Gas Filter >0.0015μm Buttweld 101.6 mm 35000 SLPM SS316L < 10µm Ra

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31363170

Bulk Gas Filter >0.0015μm Buttweld 152.4 mm 35000 SLPM SS316L < 10µm Ra

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31363180

Bulk Gas Filter >0.0015μm Buttweld 101.6 mm 60000 SLPM SS316L < 10µm Ra

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31363190

Bulk Gas Filter >0.0015μm Buttweld 152.4 mm 60000 SLPM SS316L < 10µm Ra

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31380010

Surface Mount W-seal Filter >0.0015μm 10 SLPM SS316L

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