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Filtration - IGS Filters - Surface Mount W-Seal Filters

GasShield® Surface Mount Filters provide industry-leading 0.0015 µm filtration for integrated gas systems used on board semiconductor OEM tools. GasShield® products are compliant with SEMI F86-0304 specifications for dimensions of two port components for 1.125” and 1.5” four fastener surface mount gas distribution systems with the W-seal configuration.

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31380010

Surface Mount W-seal Filter >0.0015μm 10 SLPM SS316L

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31380020

Surface Mount W-seal Filter >0.0015μm 10 SLPM SS316L

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31380025

Surface Mount W-seal Filter >0.0015μm 30 SLPM SS316L

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31380030

Surface Mount W-seal Filter >0.0015μm 50 SLPM SS316L

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31380055

Surface Mount W-seal Filter >0.0015μm 20 SLPM SS316L

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31380060

Surface Mount W-seal Filter >0.0015μm 30 SLPM SS316L

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2D

31380065

Surface Mount W-seal Filter >0.0015μm 50 SLPM SS316L

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31380070

Surface Mount W-seal Filter >0.0015μm 30 SLPM SS316L

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31380075

Surface Mount W-seal Filter >0.0015μm 10 SLPM Hastelloy® C-22

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31380080

Surface Mount W-seal Filter >0.0015μm 30 SLPM Hastelloy® C-22

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31380085

Surface Mount W-seal Filter >0.0015μm 10 SLPM SS316L

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31380090

Surface Mount W-seal Filter >0.0015μm 50 SLPM SS316L

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