31380030
Surface Mount W-seal Filter
Surface Mount W-seal Filter >0.0015μm 50 SLPM SS316L
| Article | 31380030 |
|---|---|
| Description | Surface Mount W-seal Filter >0.0015μm 50 SLPM SS316L |
| Material | SS316L |
| Material sintered filter media | SS316L Fiber |
| He leak rate | Up to 10-9 atm cc/sec |
| Flow rate | 50 SLPM |
| Max. operating temperature | 450° C |
| Connection type | W-Seal 1,125" |
| Particle shedding | Zero particle contribution above background (<1 particle> |
| Total hydrocarbons | Below detectable limits per ASTM F1398 test method |
| Moisture contribution | <10 ppb after 1 hour at low-flow ambient purge per semi f27 test method |
| Particle removal size | > 0.0015 μm |
| Filter efficiency (log reduction value) | > 9 LRV (99.9999999% reduction in particles). Confirmed at the most penetrating particle size of 0.08 μm per SEMI F38-0699 test method |
| L | 63,5 mm |
|---|---|
| L1 | 28,6 mm |
| Remarks | Custom designs and fittings available |
|---|
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GasShield® Surface Mount Filters provide industry-leading 0.0015 µm filtration for integrated gas systems used on board semiconductor OEM tools. GasShield® products are compliant with SEMI F86-0304 specifications for dimensions of two port components for 1.125” and 1.5” four fastener surface mount gas distribution systems with the W-seal configuration.