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31380060

Surface Mount W-seal Filter

Surface Mount W-seal Filter >0.0015μm 30 SLPM SS316L

Technical Specifications
Article31380060
DescriptionSurface Mount W-seal Filter >0.0015μm 30 SLPM SS316L
Material
SS316L
Material sintered filter media
Nickel
He leak rate
Up to 10-9 atm cc/sec
Flow rate
30 SLPM
Max. operating temperature
450° C
Connection type
W-Seal 1,125"
Particle shedding
Zero particle contribution above background (<1 particle>
Total hydrocarbons
Below detectable limits per ASTM F1398 test method
Moisture contribution
<10 ppb after 1 hour at low-flow ambient purge per semi f27 test method
Particle removal size
> 0.0015 μm
Filter efficiency (log reduction value)
> 9 LRV (99.9999999% reduction in particles). Confirmed at the most penetrating particle size of 0.08 μm per SEMI F38-0699 test method
Dimensions
L
66 mm
L1
28,6 mm
Remarks
Remarks
Custom designs and fittings available
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General information

GasShield® Surface Mount Filters provide industry-leading 0.0015 µm filtration for integrated gas systems used on board semiconductor OEM tools. GasShield® products are compliant with SEMI F86-0304 specifications for dimensions of two port components for 1.125” and 1.5” four fastener surface mount gas distribution systems with the W-seal configuration.

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