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Mass Flow Meter & Controller for Gases
Rough Environment Mass Flow Meters & Mass Flow Controllers for Gases
| Article | red-y-industrial-series |
|---|---|
| Description | Rough Environment Mass Flow Meters & Mass Flow Controllers for Gases |
| Manufacturer | Vögtlin instruments |
| Material housing | Aluminum |
| Air/Full scale freely selectable | Body size ¼” from 0 … 25 mln/min to 0 … 60 ln/min (from 0 … 27 SCCM to 0 … 64 SLPM) |
| Material body | Stainless steel 316L |
| Material seal | EPDM (FDA), optional FKM and FFKM |
| Response time | Meter (GIM): ± 80ms*; Controller (GIC): ± 500ms* |
| Repeatability | ± 0.2% of full scale (according to SEMI standard E56-0309) |
| Longterm stability | < 1% of measured value / year |
| Operating pressure | 0,2 – 11 bara (3 – 160 psia) / GIC with valve type 4,5 and 8: max. 8 bara (120 psia) |
| Pressure sensitivity | <0.2% / bar (<0.014% / psi) of reading (typical N2) |
| Temperature sensitivity | <0.025% FS measuring range type per 1°C (<0.012% per 1°F) |
| Warm-up time | < 1 sec. for full accuracy |
| Temperature range | 0 to 50°C |
| Medium | Air, O2*, N2*, He, Ar, CO2, H2, CH4, C3H8 (other gases and gas mixtures on request) *O2 & N2 are calibrated with air |
| Current consumption | Meter (GIM): max. 100 mA; Controller (GIC): max. 250 mA (GIC with valve type 8 max. 410mA) |
| Power supply | 24 Vdc (18 – 30 Vdc), 15 Vdc on request |
| Test pressure | 16 bara (240 psia) |
| Leak rate | < 1 x 10-6 mbar l/s He |
| Environmental protection | IP67 (conforms to NEMA 6) |
| EMC | EN 61326-1 |
| ATEX Certification | II 3G nA IIC T4 Gc (Category 3 / Zone 2) II 3D Ex tc IIIC T100°C Dc (Category 3 / Zone 22) |
| Output signals analog | 0-20 mA, 4-20 mA, 0-5 V, 1-5 V, 0-10 V, 2-10 V |
| Output signals digital | RS-485; Modbus RTU (Slave); LabView-VIs available / option: Profibus DP-V0, DP-V1 |
| Process connection | G¼” (BSPP* female) up to 60 ln/min (64 SLPM) |
| Inlet section | None required |
| Electrical connection | Cable gland with compression fitting / Option: M12 plug (DIN-standard) (both connection IP67 protected) |
| Mounting orientation | All orientations are possible. We recommend horizontal mounting. Please contact the manufacturer for further information. |