More information about IGS filters or looking for a special IGS filter? Please contact our Sales Engineers.
TEESING SALES ENGINEERS
NL: Tel. +31 70 413 07 50
CN: Tel. +86-(0)10-60576210
USA: Tel. +(1) 973 383 0691
TW: Tel. +886-(0)3-5600560
IGS FILTERS for integrated systems
Teesing offers a full series of IGS filters and flowrestrictors to provide solutions for integrated systems. This involves gas distribution (including manifolds and gas cabinets).
The IGS filters have been designed for a greater flexibilty of systems, together with the ease the exchange of filters and the reduced maintenance time. The filters are offered in 316L SS, nickel and Hasterlloy C-22 for gas compatibility, and range in flow rates from 10 to 100 litres per minute.
high flow performance
Porous metal has unique properties which provides a very wide range of flows, materials and conifgurations. This flexibility makes it possible for IGS filters to ensure every flow up to 100 slmp, while they continue to meet the standards of the demanding industry.
Complete range of product configurations
Teesing offers for the standard IGS modular system a complete kit like the 1.125" configuration with C-Seal or W-Seal, as well as the 1.5" version with C-Seal or W-Seal.
Wide range of materials
The IGS filters are available in stainless steel 316L, Hastelloy® C-22 or PENTA® Nickel. Therefore, the filters are ideally suited for usage in semiconductor proccesses with minimal risk of spreading particles.
IGS filters are also available with internal flow restriction for a reliable system.
|Full metal||Resistant to high temperatures and pressures|
|Fully welded||No mechanical seals|
|Standard dimensions||Easy installation and maintenance|
|Porous metal media||Reliable and efficient filtration (99.9999999%) up to 0.003µm|
|Standard IGS confugiration||Many configuration options|
|Compact IGS Design||Consumes less space than standard in-line designs|
|Design Flexibility||Wide range of materials, configurations and flow rates|
|Modular Design||Easy installation, minimal variations and stock|