Heated getter purifiers
More information about heated getter purifiers or looking for a special purifier? Please contact our Sales Engineers.
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HEATED GETTER PURIFIERS for removing ch4 and n2
The heated getters are ideal solutions for the purification of places where the removal of CH4 and N2 are required. These purifiers are specifically developed for the purification of UHP gases in semiconductor applications. Outgoing impurities for oxygen, hydrogen, carbon monoxide, carbon dioxide and nitrogen are reduces to below ppb level.
There are heated getter available for the following gases: Argon, helium, nitrogen, hydrogen and other gases. The heated getter are frequently used during the purification of gases in semiconductor proccesses, but also the quality of the stored gases in the aerospace industry in gas chromatography analytical applications is ensured.
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