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More information about point of use gas purifiers or looking for a special point of use gas purifier? Please contact our Sales Engineers.

NL: +31 70 413 07 00
CN: +86-(0)10-60576210
USA: +(1) 973 383 0691
TW: +886-(0)3-5600560

We know that the purity of gases in your low flow rate applications has big implications. Point-of-use purifiers offer a relatively low flow rate that span from 0.1 slpm to 100 slpm, serving a single application. We deliver state-of-the-art point-of-use purifiers by MOTT. These are designed for high purity and ultra-high purity applications that require impurity levels in process gases to be 100 PPT or less.

Various models according to your application

Mott’s point-of-use purifiers accommodate various flow rates, diverse gases and a lot of different configurations to meet your needs. Various fill materials are available to cater to the gases being purified and the impurities that need to be removed, such as heated getters, catalysts for reactive gases, and absorbers for moisture and hydrocarbon removal.

Our point-of-use purifiers come in 3 different models:

  1. Vessel only purifiers
    Operate without requiring heat to remove impurities.
  2. In-line purifiers
    Incorporate a heater, temperature indication, and control.
  3. Panel series purifiers
    Offer advanced automation and integration.

Based on a targeted 2 year service life at nominal flow 24/7, our point-of-use purifiers are produced to uphold process gas integrity for ultra-high purity applications requiring impurity levels of 100 PPT or less at an input quality of 99,999%.


  • Semiconductor process equipment
  • Weld gas/purge gas
  • Pharmaceutical production
  • Analytical equipment
  • Annealing cover gas
  • Solar and energy
  • Other emerging technologies

Customized configurations and clean assembly

With customized configurations versatile application demands are met. Such options include various inlet/outlet fittings, filtration, additional valves and flow metering, a hydrogen removal stage, and in some cases, specific power supply voltage.

Teesing has designtest and cleanroom production facilities to accommodate front-to-end subsystem needs.

Features at a glance

  • 316L stainless steel construction
  • Nominal flow rates from 0.3 to 20 slpm
  • Maximum flow rates from 4.5 to 300 slpm 
  • Integral Particle Filtration
  • Simple installation

Vessel purifiersVessel only-purifiers

inline en paneel purifiersIn-line & panel purifiers