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31363020

Bulk Gas Filter

Bulk Gas Filter >0.0015μm Buttweld 50.8 mm 15000 SLPM SS316L

技術規格
Article31363020
敘述Bulk Gas Filter >0.0015μm Buttweld 50.8 mm 15000 SLPM SS316L < 10µm Ra
材質SS316L
燒結過濾介質材質Penta Nickel
最大使用壓力44.8 barg
洩漏率Up to 10-9 atm cc/sec
最大壓差17.2 bar
流速15000 SLPM
最大值工作溫度450° C
類型Tube Stub
Particle shedding
Zero particle contribution above background (<1 particle>
Total hydrocarbons
Below detectable limits per ASTM F1398 test method
Moisture contribution
<10 ppb after 1 hour at low-flow ambient purge per semi f27 test method
Particle removal size
> 0.0015 μm
大甲清洗程序> 9 LRV (99.9999999% reduction in particles). Confirmed at the most penetrating particle size of 0.08 μm per SEMI F38-0699 test method
拋光Electro polishing
表面處理< 10µm Ra
尺寸
C
50,8 mm
Ø D76,2 mm
L
583,7 mm
備註
備註Custom designs and fittings available
商品比較
基本資料

Bulk Filters provide 9-log filtration of particles down to 0.0015 µm resulting in particle-free gas. In addition, the flow versus differential pressure performance of the filter is equal or superior to the performance of competitive polymer products on the market today.

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