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31380030

Surface Mount W-seal Filter

Surface Mount W-seal Filter >0.0015μm 50 SLPM SS316L

技術規格
Article31380030
敘述Surface Mount W-seal Filter >0.0015μm 50 SLPM SS316L
材質SS316L
燒結過濾介質材質SS316L Fiber
洩漏率Up to 10-9 atm cc/sec
流速50 SLPM
最大值工作溫度450° C
類型W-Seal 1,125"
Particle shedding
Zero particle contribution above background (<1 particle>
Total hydrocarbons
Below detectable limits per ASTM F1398 test method
Moisture contribution
<10 ppb after 1 hour at low-flow ambient purge per semi f27 test method
Particle removal size
> 0.0015 μm
過濾效率> 9 LRV (99.9999999% reduction in particles). Confirmed at the most penetrating particle size of 0.08 μm per SEMI F38-0699 test method
尺寸
L
63,5 mm
L1
28,6 mm
備註
備註Custom designs and fittings available
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基本資料

GasShield® Surface Mount Filters provide industry-leading 0.0015 µm filtration for integrated gas systems used on board semiconductor OEM tools. GasShield® products are compliant with SEMI F86-0304 specifications for dimensions of two port components for 1.125” and 1.5” four fastener surface mount gas distribution systems with the W-seal configuration.

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