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31321235

Utility Filter

Utility Filter >0.0015μm Face seal male 1/2 SS316L

技術規格
Article31321235
敘述Utility Filter >0.0015μm Face seal male 1/2 SS316L < 10µm Ra
材質SS316L
燒結過濾介質材質Penta Nickel
最大使用壓力44.8 barg
洩漏率Up to 10-9 atm cc/sec
最大壓差17.2 bar
最大值工作溫度450° C
類型Face seal male/Face seal male
Particle shedding
Zero particle contribution above background (<1 particle>
Total hydrocarbons
Below detectable limits per ASTM F1398 test method
Moisture contribution
<10 ppb after 1 hour at low-flow ambient purge per semi f27 test method
Particle removal size
> 0.0015 μm
大甲清洗程序> 9 LRV (99.9999999% reduction in particles). Confirmed at the most penetrating particle size of 0.08 μm per SEMI F38-0699 test method
拋光Electro polishing
表面處理< 10µm Ra
尺寸
C
Face seal male 1/2
Ø D76,2 mm
L
225 mm
SW (HEX)
23,8
備註
備註Custom designs and fittings available
商品比較
基本資料

For high flow gas filtration efficiency, strength, and reliability, GasShield Penta® all-metal gas filters are ideal for ultra high purity gas delivery applications. They are offered in all welded 316L stainless steel housings with Penta® Nickel filter media and are compatible with most high purity semiconductor process gases. These filters provide 9-log filtration of particles down to 0.0015 µm.

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